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The harmless treatment and resource utilization of the high boiling chlorosilane produced by products in the process of polycrystalline silicon production can be realized by using organic amine catalyst. The effects of reaction temperature and catalyst type on the catalytic cracking of high-boiling chlorosilane was investigated and the reaction mechanism was analyzed. The results showed that, using N,N-dimethylbenzylamine as the catalyst, at a reaction temperature of 130 ~ 135 °C, a reaction time of 1.5 h, and a catalyst amount of 8%, the yield of monosilane product could reach 79.99%. [ABSTRACT FROM AUTHOR]