1. Influence of Substrate Nature and Annealing on Electro-Optical Properties of ZnO Thin Films
- Author
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Felicia Iacomi, Nicoleta Iftimie, C. Baban, P. Prepelita, and Dorin Luca
- Subjects
Materials science ,Silicon ,Annealing (metallurgy) ,business.industry ,chemistry.chemical_element ,Carbon film ,Semiconductor ,chemistry ,Vacuum deposition ,Electrical resistivity and conductivity ,Optoelectronics ,Wafer ,Thin film ,business - Abstract
ZnO thin films were grown on different substrates (glass, quartz, silicon wafers, etc) by vacuum thermal evaporation. Different thermal treatments were performed in order to obtain transparent and conductive or high resistive ZnO tin films. The optical and electrical properties of ZnO thin films are dependent on the crucible temperature, annealing conditions and on the substrate nature. The thin films are transparent and have an electrical resistivity in 10−4 Ωm regio. The annealing process performed in vacuum at 573K or under UV irradiation determines a decrease in the electrical resistivity of films.
- Published
- 2007
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