1. Study of the Initial Stages of Deposition of Graphene-like Films by Sublimation of Amorphous Carbon.
- Author
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Mladenoff, J., Tzonev, L., Kirilov, K., Avramova, I., Avdeev, G., Valcheva, E., Russev, S., Arnaudov, B., Terziiska, P., Kolev, S., and Milenov, T.
- Subjects
AMORPHOUS carbon ,GRAPHENE ,SUBLIMATION (Chemistry) ,CARBON films ,X-ray photoelectron spectroscopy - Abstract
The initial stages of deposition of graphene-like thin films have been studied by X-ray photoelectron spectroscopy, scanning electron microscopy, Raman spectroscopy and ellipsometry. The deposition process has been performed by sublimation of amorphous carbon on 330 nm SiO
2 /(001) Si substrates with surface area of 15× 15 mm². The sublimation process was carried out in a quartz tube having an internal diameter of 25 mm at a temperature of 1050°C in which samples were placed in an argon flow of about 1 cm³/s for 3 to 15 minutes. As a source of amorphous carbon, modified carbon blacks SPHERON 5000 were used. We established that an amorphous carbon film with thickness up to 3-6 nm is always deposited on the SiO2 after 3-5 min deposition and the deposition of a few-layered defected graphene as well as nano-sized graphite occurs after 5-6 min on the surface of substrate. Further on, after 8-10min deposition a non-continuous carbon film is formed and after 12-13 min the substrate is covered by a smooth and continuous carbon film. The film has extremely low resistivity (ρ= 2.8 × 10−6 Ω.m) and consists of predominantly sp² hybridized carbon with a Raman spectrum similar to those of nano-sized graphene. [ABSTRACT FROM AUTHOR]- Published
- 2019
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