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A double flush-mounted probe method is proposed to analyze the characteristics of intermediate-pressure plasmas (10–100 Pa) by a sheath criterion. The analytical model mainly focuses on the effect of the ion drift velocity in the sheath edge and then provides a correction factor for the measured ion-collection current. The reduction of the ion current is attributed to ion–neutral collisions leading to the modified Bohm velocity. To validate this method, the ion density is calculated and compared with that measured by two types of cylindrical probes, and the results agree well with the data measured by other probes. On the basis of this work, the double flush-mounted probe can be adopted to diagnose plasma parameters accurately, without a reference electrode, in collisional and certain complex plasma environments, such as the reentry plasma sheath.

Considering the gas pressure and radio frequency power change, the mode transition of E↔H were investigated in inductively coupled plasmas. It can be found that the transition power has almost the same trend decreasing with gas pressure, whether it is in H mode or E mode. However, the transition density increases slowly with gas pressure from E to H mode. The transition points of E to H mode can be understood by the propagation of electromagnetic wave in the plasma, while the H to E should be illustrated by the electric field strength. Moreover, the electron density, increasing with the pressure and power, can be attributed to the multiple ionization, which changes the energy loss per electron-ion pair created. In addition, the optical emission characteristics in E and H mode is also shown. The line ratio of I750.4 and I811.5, taken as a proxy of the density of metastable state atoms, was used to illustrate the hysteresis. The 750.4 nm line intensity, which has almost the same trend with the 811.5 nm line intensity in H mode, both of them increases with power but decreases with gas pressure. The line ratio of 811.5/750.4 has a different change rule in E mode and H mode, and at the transition point of H to E, it can be one significant factor that results in the hysteresis as the gas pressure change. And compared with the 811.5 nm intensity, it seems like a similar change rule with RF power in E mode. Moreover, some emitted lines with lower rate constants don’t turn up in E mode, while can be seen in H mode because the excited state atom density increasing with the electron density.Considering the gas pressure and radio frequency power change, the mode transition of E↔H were investigated in inductively coupled plasmas. It can be found that the transition power has almost the same trend decreasing with gas pressure, whether it is in H mode or E mode. However, the transition density increases slowly with gas pressure from E to H mode. The transition points of E to H mode can be understood by the propagation of electromagnetic wave in the plasma, while the H to E should be illustrated by the electric field strength. Moreover, the electron density, increasing with the pressure and power, can be attributed to the multiple ionization, which changes the energy loss per electron-ion pair created. In addition, the optical emission characteristics in E and H mode is also shown. The line ratio of I750.4 and I811.5, taken as a proxy of the density of metastable state atoms, was used to illustrate the hysteresis. The 750.4 nm line intensity, which has almost the same trend with the 811.5 nm line...

In this study, laboratory observations of the perturbations of the magnetic field are reported due to the injection of attachment chemicals (CF4, SF6, and CO2) into argon plasmas. Besides the well-known electron density reduction, we also observed magnetic field perturbation in the experiment. The measured induced voltage B, which is taken as a proxy of the time-changing electromagnetic field, fluctuates in the boundary layer between the ambient plasmas and negative ions plasmas. Perturbations of the magnetic field were investigated by changing the ambient pressure and ratio of attachment chemicals. The measured B keeps increasing in these lower pressures; but it no longer increases as the ambient pressure higher than a threshold, e.g., for CF4, SF6, and CO2, the transition pressure is 6Pa, 5Pa and 4Pa, respectively. The magnitude of the B increase with the change of the ratio of release flow until at higher ratios, e.g., 40%. We transformed these time-sampled data into the frequency domain and found c...