1. Experimental Study on Effects of Translational Movement on Surface Planarity in Magnetorheological Planarization Process
- Author
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Shen Gong, Yong Qiang Wang, Shao Hui Yin, and Ye Peng Li
- Subjects
Optical glass ,business.industry ,Chemistry ,Chemical-mechanical planarization ,Magnetorheological fluid ,General Engineering ,Perpendicular ,Structural engineering ,Computer Science::Computational Geometry ,Composite material ,Air gap (plumbing) ,business ,Planarity testing - Abstract
To improve surface planarity, a translational movement is added into the magnetorheoloigcal planarization process. To explore effects of some process parameters, including trajectory type, stroke and reciprocate velocity, on surface planarity, a set of finishing experiments are carried out. The results show that planarity is well improved when the trough reciprocates perpendicularly to the air gap. Surface planarity decreases as stoke increases but is hardly affected by reciprocate velocity. Using the magnetorheoloigcal planarization process with addition of translational movement, an ultra-smooth surface with planarity of micron order in PV is achieved on a K9 optical glass.
- Published
- 2016
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