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Different SrTiO3 thin films are investigated to unravel the nature of ultra‐low conductivities recently found in SrTiO3 films prepared by pulsed laser deposition. Impedance spectroscopy reveals electronically pseudo‐intrinsic conductivities for a broad range of different dopants (Fe, Al, Ni) and partly high dopant concentrations up to several percent. Using inductively‐coupled plasma optical emission spectroscopy and reciprocal space mapping, a severe Sr deficiency is found and positron annihilation lifetime spectroscopy revealed Sr vacancies as predominant point defects. From synchrotron‐based X‐ray standing wave and X‐ray absorption spectroscopy measurements, a change in site occupation is deduced for Fe‐doped SrTiO3 films, accompanied by a change in the dopant type. Based on these experiments, a model is deduced, which explains the almost ubiquitous pseudo‐intrinsic conductivity of these films. Sr deficiency is suggested as key driver by introducing Sr vacancies and causing site changes (FeSr and TiSr) to accommodate nonstoichiometry. Sr vacancies act as mid‐gap acceptor states, pinning the Fermi level, provided that additional donor states (most probably TiSr••\[{\rm{Ti}}_{{\rm{Sr}}}^{ \bullet \bullet }\]) are present. Defect chemical modeling revealed that such a Fermi level pinning also causes a self‐limitation of the Ti site change and leads to a very robust pseudo‐intrinsic situation, irrespective of Sr/Ti ratios and doping. [ABSTRACT FROM AUTHOR]

The impact of UV irradiation on Fe‐doped SrTiO3 (Fe:STO) single crystals is investigated at elevated temperatures. Illumination leads to incorporation of oxygen into the single crystals and thus to a decreasing oxygen vacancy concentration and oxidation of Fe3+ to Fe4+. The Fe4+ ions cause a color change from transparent/brownish to black. This photochromic blackening due to stoichiometry changes at elevated temperatures is irreversible at room temperature, but annealing at high temperatures, for example at 700 °C, can restore the original stoichiometry and color. Absorbance changes due to UV irradiation are monitored by ex situ and in situ UV–vis spectroscopy experiments and changes in electrical properties are measured by van der Pauw measurements and in‐plane electrochemical impedance spectroscopy. After 1140 min of illumination at 440 °C, for example, electrical measurements reveal a conductivity increase by more than a factor of 5 due to the enhanced hole concentration in blackened Fe:STO. In addition, UV illumination increases the oxygen chemical potential up to a calculated p(O2) of more than 109 Pa in Fe:STO. Hence, UV light can be used to tune the color, but also electrical properties of Fe:STO by directly impacting the bulk defect concentrations. [ABSTRACT FROM AUTHOR]