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A micro initiation train is designed to meet the requirement of MEMS fuze. The micro initiation train integrates all the functions of a conventional mechanical safety and arm (S&A)fire system, and integrates them within 3 cm3. The architecture of the micro initiation train consists of bottom, intermediary and top layers. The bottom layer contributes to the mechanical arming and detonation transfer function. The intermediary layer is Si-based initiator and micro-pyrotechnical actuator. The top layer is the electronics and power supply. The test results show that the safe, arming and firing functions of micro initiation train are achieved, and the output pressure is about 10.85 GPa. [ABSTRACT FROM AUTHOR]