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The present study investigates the impact of sputtering configurations on the microstructure and crystallinity of thin-film yttria-stabilized zirconia electrolytes for anodized aluminum oxide-supported all-sputtered thin-film reversible solid oxide cells. Employing various sputtering parameters, such as target-substrate distance and substrate rotation speed, the present study reveals distinct surface characteristics and crystalline structures of thin-film yttria-stabilized zirconia. The microstructure analysis includes scanning electron microscopy and atomic force microscopy examinations, uncovering the influence of the process parameters on the surface morphology, roughness, and grain size. X-ray diffraction data illustrate the texture preferences and crystallite characteristics. The electrochemical characterization of the reversible solid oxide cells demonstrates that the optimized sputtering configuration significantly outperforms the others in both SOFC and SOEC modes, showing exceptional current densities of 964 mA/cm 2 at 1.3 V in electrolysis mode at 500 °C. Electrochemical impedance spectroscopy further reveals improved charge transfer reactions at the interface of the electrolyte. The enhanced electrochemical performance is attributed to the unique microstructure and crystallinity of the thin film of yttria-stabilized zirconia. The record-breaking electrolysis performance of this work at 500 °C underscores the potential of tailored sputtering parameters in optimizing the reversible solid oxide cell performance.

The incorporation of energetic helium gaseous species into materials such as tungsten (W) imparts intrinsic surface fragility, yielding fuzzy tungsten. To enhance the robustness of the surface layers, aluminum oxide (AlO x ) was deposited by atomic layer deposition into the fuzzy W. The conformally deposited ceramic yields a new class of surface composites. Structural characterization of the fuzzy W-AlO x composites through nanoindentation testing indicated enhanced indentation modulus ( E ind ) and was modeled through various rules of mixtures approaches. The distribution of AlO H ind W was explored and a systematic study of the extent of incorporation of the AlO x in fuzzy W was carried out. The synthesized composites may be utilized for improved structural characteristics, e.g., in reducing crack initiation and fracture. x into the fuzzy W was carried out. The synthesized composites may be utilized for improved structural characteristics, e.g., in reducing crack initiation and fracture.

To overcome significantly sluggish oxygen-ion conduction in the electrolytes of low-temperature solid-oxide fuel cells (SOFCs), numerous researchers have devoted considerable effort to fabricating the electrolytes as thin as possible. However, thickness is not the only factor that affects the electrolyte performance; roughness, grain size, and internal film stress also play a role. In this study, yttria-stabilized zirconia (YSZ) was deposited via a reactive sputtering process to fabricate high-performance thin-film electrolytes. Various sputtering chamber pressures (5, 10, and 15 mTorr) were investigated to improve the electrolytes. As a result, high surface area, large grain size, and residual tensile stress were successfully obtained by increasing the sputtering pressure. To clarify the correlation between the microstructure and electrolyte performance, a YSZ thin-film electrolyte was applied to anodized aluminum oxide-supported SOFCs composed of conventional electrode materials which are Ni and Pt as the anode and the cathode, respectively. The thin-film SOFC with YSZ deposited at 15 mTorr exhibited the lowest ohmic resistance and, consequently, the highest maximum power density (493 mW/cm 2 ) at 500 °C whose performance is more than five times higher than that of the cell with YSZ deposited at 5 mTorr (94.1 mW/cm 2 ). Despite the basic electrode materials, exceptionally high performance at low operating temperature was achieved via controlling the single fabrication condition for the electrolyte.