1. Single-Crystalline 3C-SiC anodically Bonded onto Glass: An Excellent Platform for High-Temperature Electronics and Bioapplications
- Author
-
Leonie Hold, Tuan-Khoa Nguyen, Tadatomo Suga, Raja Vadivelu, Hoang-Phuong Phan, Nam-Trung Nguyen, Barry J. Wood, Fengwen Mu, Han-Hao Cheng, Ben Haylock, Dzung Viet Dao, Glenn M. Walker, Toan Khac Dinh, Harshad Kamble, Mirko Lobino, and Alan Iacopi
- Subjects
Materials science ,Nanotechnology ,02 engineering and technology ,Substrate (electronics) ,Chemical vapor deposition ,01 natural sciences ,Cell Line ,Mice ,chemistry.chemical_compound ,X-ray photoelectron spectroscopy ,0103 physical sciences ,Silicon carbide ,Animals ,General Materials Science ,Wafer ,Thin film ,Electrodes ,010302 applied physics ,business.industry ,Photoelectron Spectroscopy ,Temperature ,021001 nanoscience & nanotechnology ,chemistry ,Anodic bonding ,Optoelectronics ,Glass ,0210 nano-technology ,business ,Layer (electronics) - Abstract
Single-crystal cubic silicon carbide has attracted great attention for MEMS and electronic devices. However, current leakage at the SiC/Si junction at high temperatures and visible-light absorption of the Si substrate are main obstacles hindering the use of the platform in a broad range of applications. To solve these bottlenecks, we present a new platform of single crystal SiC on an electrically insulating and transparent substrate using an anodic bonding process. The SiC thin film was prepared on a 150 mm Si with a surface roughness of 7 nm using LPCVD. The SiC/Si wafer was bonded to a glass substrate and then the Si layer was completely removed through wafer polishing and wet etching. The bonded SiC/glass samples show a sharp bonding interface of less than 15 nm characterized using deep profile X-ray photoelectron spectroscopy, a strong bonding strength of approximately 20 MPa measured from the pulling test, and relatively high optical transparency in the visible range. The transferred SiC film also exhibited good conductivity and a relatively high temperature coefficient of resistance varying from -12 000 to -20 000 ppm/K, which is desirable for thermal sensors. The biocompatibility of SiC/glass was also confirmed through mouse 3T3 fibroblasts cell-culturing experiments. Taking advantage of the superior electrical properties and biocompatibility of SiC, the developed SiC-on-glass platform offers unprecedented potentials for high-temperature electronics as well as bioapplications.
- Published
- 2017
- Full Text
- View/download PDF