1. A mems-based gas chromatograph front-end for a miniature spectrometer
- Author
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Andrew Morse, Arno Hoogerwerf, Ian Wright, Geraint Morgan, Simon Sheridan, Simeon Barber, and Guido Spinola Durante
- Subjects
Microelectromechanical systems ,Materials science ,Spectrometer ,business.industry ,010401 analytical chemistry ,Analytical chemistry ,02 engineering and technology ,Chemical vapor deposition ,engineering.material ,021001 nanoscience & nanotechnology ,Mass spectrometry ,01 natural sciences ,0104 chemical sciences ,Coating ,engineering ,Optoelectronics ,Fluidics ,Gas chromatography ,0210 nano-technology ,business ,Gas chromatography ion detector - Abstract
A MEMS-based gas chromatograph (GC) front-end for a mass spectrometer has been developed for space applications. The GC uses Molecular Vapor Deposition (MVD) to achieve a uniform coating of the GC column. Particular attention has been paid to the fluidic connections of the MEMS to the external tubing.
- Published
- 2017
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