Search

Your search keyword '"A. S. Khramov"' showing total 1 results
Start Over Author "A. S. Khramov" Journal 2016 14th international baltic conference on atomic layer deposition (bald)
1 results on '"A. S. Khramov"'

1. Measuring the thickness of ALD-fabricated thin films by small-angle X-ray scattering

Author

Vladimir S. Khramov, K. N. Nishchev, M. I. Novopol'tsev, Natalia A. Ruzavina, and Ekaterina N. Lyutova

Subjects
Range (particle radiation), Materials science, Silicon, Scattering, business.industry, Small-angle X-ray scattering, Analytical chemistry, chemistry.chemical_element, Equivalent oxide thickness, Atomic layer deposition, chemistry, Atomic layer epitaxy, Optoelectronics, Thin film, business
Abstract

The thickness of aluminum oxide thin films fabricated by technology of atomic layer deposition with different number of cycles measured by small angle X-ray scattering. The dependence of the film thickness in the range of 20–120 nm from the number of ALD process cycles is linear.

Published
2016
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results