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Start Over Author "Ante Hecimovic" Journal 2012 abstracts ieee international conference on plasma science
1 results on '"Ante Hecimovic"'

1. Phenomenological description of a symmetry breaking rotating instability in HPPMS discharges

Author

Jörg Winter, William Nicholas Guy Hitchon, Ralf Peter Brinkmann, Ante Hecimovic, Denis Eremin, Thomas Mussenbrock, Marc Böke, Teresa de los Arcos, Volker Schulz-von der Gathen, and Sara Gallian

Subjects
Materials science, Sputtering, Ionization, Physical vapor deposition, Biasing, Symmetry breaking, Plasma, High-power impulse magnetron sputtering, Atomic physics, Sputter deposition
Abstract

Summary form only given. High Power Pulsed Magnetron Sputtering (HPPMS) is a recently developed Ionized Physical Vapor Deposition (IPVD) technique. A bias voltage is applied to the target for a few hundred microseconds with a frequency of a few hundreds of Hertz, delivering several kW cm−2 of power to the target. This results in the production of an ultra dense plasma with a high ionization degree, showing some peculiar behaviors.

Published
2012
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