Search

A novel topology for a micromachined acoustic speaker suitable for cellular phones is proposed in this paper. The membrane is composed of two materials, each of them with different function: a silicon moving part acting as a rigid piston, and polymer annulus acting only as suspension. The high ratio between Young moduli and masses of membrane and suspension leads to a simpler design of the mass-spring-damper system. This new topology can be obtained thanks to a new micromachining technology, that leads to an higher adhesion between polymer and silicon. Simulations presenting the main micro-loudspeaker parameters (e.g. SPL, frequency response) are presented in details as also the principal technological steps.

The electrochemotherapy is an effective treatment that requires the application of an intense electric field to the tumoral tissue to open the cellular membrane and deliver drugs. This work will present the results of the ongoing research project, showing a new technology and design geometry that allows to realize flexible electrodes able to wrap biological tissues bringing the necessary electric field intensity for the electroporation of cells to reach a unique penetration depth to the centimeter range. The flexible electrode is realized by conversion of porous silicon into nano-porous metals (copper and/or gold) filled by a biocompatible thermoplastic polymer.