1. Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy
- Author
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Ryutaro Maeda, Yoshiaki Kanamori, Kensuke Ishizu, Kohei Morishita, Hitomi Yamaguchi, Kazuo Nakajima, Kazuhisa Mitsuda, Ikuyuki Mitsuishi, Makoto Mita, Noriko Y. Yamasaki, Teppei Moriyama, Susumu Sugiyama, Raul E. Riveros, Yuichiro Ezoe, and Mitsuhiro Horade
- Subjects
Microelectromechanical systems ,Physics ,Silicon ,business.industry ,Ultra lightweight ,chemistry.chemical_element ,X-ray optics ,Computer Science::Other ,Magnetic field ,Optics ,chemistry ,Surface roughness ,Deep reactive-ion etching ,Optoelectronics ,Space astronomy ,business - Abstract
We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with the expected angular resolution based on the surface roughness of the DRIE formed side walls. To achieve a better angular resolution, we will condition annealing and magnetic field assisted finishing processes.
- Published
- 2011
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