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Start Over Author "Vandeweyer, T." Journal 2006 international electron devices meeting
1 results on '"Vandeweyer, T."'

1. Doubling or quadrupling MuGFET fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency

Author

Rooyackers, R., primary, Augendre, E., additional, Degroote, B., additional, Collaert, N., additional, Nackaerts, A., additional, Dixit, A., additional, Vandeweyer, T., additional, Pawlak, B., additional, Ercken, M., additional, Kunnen, E., additional, Dilliway, G., additional, Leys, F., additional, Loo, R., additional, Jurczak, M., additional, and Biesemans, S., additional

Published
2006
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