1. Fabrication of β'-alumina films as a thermoelectric material by thermal plasma processing
- Author
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O. Fukumasa, S. Sakiyama, J.T. Kim, J.K. Park, and D.C. Lee
- Subjects
Fabrication ,Argon ,Materials science ,Atmospheric pressure ,chemistry ,Thermoelectric effect ,Analytical chemistry ,chemistry.chemical_element ,Substrate (electronics) ,Thermoelectric materials ,Plasma processing ,Plasma stability - Abstract
The fabrication of /spl beta/"-alumina films, as a thermoelectric material, by thermal plasma processing based on the forced constrictive type reactor was investigated. Under both atmospheric and low pressure, /spl beta/"-alumina films were successfully synthesized from mixed powder of /spl alpha/-Al/sub 2/O/sub 3/, Na/sub 2/CO/sub 3/ and MgO. The jet power and substrate position strongly affect the properties of plasma processed /spl beta/"-alumina, which was found to be correlated with jet temperature. For both pressures, the films show good thermoelectric properties.
- Published
- 2002
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