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Hypothesis: In recent years, some modern techniques such as plasma, ultraviolet irradiation and ozone treatment have been used in surface modification of polymers. Surface modification of polymeric fibers is aimed to improve dying and to achieve desirable physical properties like high moisture absorption and lower anti-static. In this study in an attempt to modify the surface of polyester fibers, a new complex method through ultraviolet/ozone treatment in two wet and dry forms has been applied. Methods: Surface modification of polyester fibers was performed by ultraviolet/ozone treatment on dry samples, as well as on samples impregnated with water, hydrogen peroxide and hydrogen peroxide/sodium silicate solutions. In order to study and compare the functional groups and morphology of the polyester fibers with those of control sample, Fourier-transform infrared spectroscopy (FTIR) and scanning electron microscopy (SEM) were used. Also, the moisture absorption and static electricity of the samples were studied.Findings: The results of FTIR spectra revealed that by ultraviolet/ozone treatment the number of oxygen-containing functional groups has increased considerably. Also, nanoscale surface roughness of the treated samples was revealed by SEM images. Additionally, the results indicated that moisture absorption of the treated polyester fibers has risen and consequently their static electricity has decreased. According to the results, the impregnation of polyester fibers can remarkably enhance surface oxidation process.