1. Predicting scattering scanning near-field optical microscopy of mass-produced plasmonic devices
- Author
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Otto, LM, Burgos, SP, Staffaroni, M, Ren, S, Süzer, Ö, Stipe, BC, Ashby, PD, and Hammack, AT
- Subjects
Applied Physics ,Mathematical Sciences ,Physical Sciences ,Engineering - Abstract
Scattering scanning near-field optical microscopy enables optical imaging and characterization of plasmonic devices with nanometer-scale resolution well below the diffraction limit. This technique enables developers to probe and understand the waveguide-coupled plasmonic antenna in as-fabricated heat-assisted magnetic recording heads. In order to validate and predict results and to extract information from experimental measurements that is physically comparable to simulations, a model was developed to translate the simulated electric field into expected near-field measurements using physical parameters specific to scattering scanning near-field optical microscopy physics. The methods used in this paper prove that scattering scanning near-field optical microscopy can be used to determine critical sub-diffraction-limited dimensions of optical field confinement, which is a crucial metrology requirement for the future of nano-optics, semiconductor photonic devices, and biological sensing where the near-field character of light is fundamental to device operation.
- Published
- 2018