Author: "T Ariga" / Database: dblp computer science bibliography - Searchworks@Jio Institute Digital Library Search Results

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1. Fluorine-free Word Line Molybdenum Process for Enhancing Scalability and Reliability in 3D Flash Memory.

Author: T. Fukushima, T. Kashima, S. Seto, H. Ohtori, M. Kato, K. Katou, H. Takehira, Y. Sugawara, Z. Zhu, K. Hara, R. Osanai, T. Beppu, H. Tahara, T. Ishiku, K. Takahashi, T. Ariga, Y. Ueda, Y. Matamura, Y. Mukae, N. Takeguchi, Y. Maruyama, R. Nishikawa, H. Kitagawa, J. Asakawa, Y. Uchiyama, K. Ohuchi, and K. Sekine
Published: 2024
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