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Nano-electro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus hindering mass-scale utilization. We have developed a CMOS technology platform for nano-electro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for enhanced optomechanical interaction. Room temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains., Comment: 10 pages, 3 figures. Comments are welcome

A strong trend for quantum based technologies and applications follows the avenue of combining different platforms to exploit their complementary technological and functional advantages. Micro and nano-mechanical devices are particularly suitable for hybrid integration due to the easiness of fabrication at multi-scales and their pervasive coupling with electrons and photons. Here, we report on a nanomechanical technological platform where a silicon chip is combined with an aluminum nitride layer. Exploiting the AlN piezoelectricity, Surface Acoustic Waves are injected in the Si layer where the material has been localy patterned and etched to form a suspended nanostring. Characterizing the nanostring vertical displacement induced by the SAW, we found an external excitation peak efficiency in excess of 500 pm/V at 1 GHz mechanical frequency. Exploiting the long term expertise in silicon photonic and electronic devices as well as the SAW robustness and versatility, our technological platform represents a strong candidate for hybrid quantum systems.

Silicon on insulator photonics has offered a versatile platform for the recent development of integrated optomechanical circuits. However, there are some constraints such as the high cost of the wafers and limitation to a single physical device level. In the present work we investigate nanocrystalline silicon as an alternative material for optomechanical devices. In particular, we demonstrate that optomechanical crystal cavities fabricated of nanocrystalline silicon have optical and mechanical properties enabling non-linear dynamical behaviour and effects such as thermo-optic/free-carrier-dispersion self-pulsing, phonon lasing and chaos, all at low input laser power and with typical frequencies as high as 0.3 GHz., Comment: 16 pages, 6 figures

We study the relaxation of coherent acoustic phonon modes with frequencies up to 500 GHz in ultra-thin free-standing silicon membranes. Using an ultrafast pump-probe technique of asynchronous optical sampling, we observe that the decay time of the first-order dilatational mode decreases significantly from \sim 4.7 ns to 5 ps with decreasing membrane thickness from \sim 194 to 8 nm. The experimental results are compared with theories considering both intrinsic phonon-phonon interactions and extrinsic surface roughness scattering including a wavelength-dependent specularity. Our results provide insight to understand some of the limits of nanomechanical resonators and thermal transport in nanostructures.

Submicron-sized mesas of resonant tunneling diodes (RTDs) with split drain contacts have been realized and the current-voltage characteristics have been studied in the bistable regime at room temperature. Dynamically-biased, the RTDs show noise-triggered firing of spike-like signals and can act as reconfigurable universal logic gates for small voltage changes of a few mV at the input branches. These observations are interpreted in terms of a stochastic nonlinear processes in the split RTD, which are found to be robust against noise. The split RTDs show also gain for the fired-signal bursts, can be easily integrated to arrays of multiple inputs and have thus the potential to mimic neuron nodes in nanoelectronic circuits., Comment: 4 pages, 6 figures

We investigate carrier transport in a single 22 nm-thick double-gated Si quantum well device, which has independent contacts to electrons and holes. Conductance, Hall density and Hall mobility are mapped in a broad double-gate voltage window. When the gate voltage asymmetry is not too large only either electrons or holes occupy the Si well and the Hall mobility shows the fingerprints of volume inversion/accumulation. At strongly asymmetric double-gate voltage an electric field induced electron-hole (EH) bi-layer is formed inside the well. The EH drag resistance R_{he} is explored at balanced carrier densities: R_{he} decreases monotonically from 860 to 37 Ohms when the electron and hole density is varied between ~0.4-1.7x10^{16} m^{-2}.

We design an efficient coupler to transmit light from a strip waveguide into the flatband slow mode of a photonic crystal waveguide with ring-shaped holes. The coupler is a section of a photonic crystal waveguide with a higher group velocity, obtained by different ring dimensions. We demonstrate coupling efficiency in excess of 95% over the 8 nm wavelength range where the photonic crystal waveguide exhibits a quasi constant group velocity vg = c/37. An analysis based on the small Fabry-P\'erot resonances in the simulated transmission spectra is introduced and used for studying the effect of the coupler length and for evaluating the coupling efficiency in different parts of the coupler. The mode conversion efficiency within the coupler is more than 99.7% over the wavelength range of interest. The parasitic reflectance in the coupler, which depends on the propagation constant mismatch between the slow mode and the coupler mode, is lower than 0.6% within this wavelength range., Comment: 11 pages, 7 figures, submitted to Photonics and Nanostructures - Fundamentals and Applications

The gate bias dependency of conductivity is examined in two Si quantum wells with well thickness tw = 7 nm and tw = 14 nm. The conductivity of the thinner device behaves smoothly whereas the thicker device shows strong non-monotonic features as a function of gate voltages. We show that a strong minimum in conductivity occurs close to the threshold of second sub-band. Another minimum is seen at high electron density at symmetric well potential. This feature is addressed to sub-band wave function delocalization in the quantization direction., Comment: To appear in the Proceedings of ICPS28th (Vienna, Austria, July 24-28, 2006)

The temperature dependent energy transfer rate between charge carriers and lattice has been experimentally investigated in ferromagnetic semiconductors. Studied 100 nm thick low-temperature MBE grown Mn_{x}Ga_{1-x}As samples had manganese concentrations x=3.7 % and 4.0 %. Curie temperatures estimated from temperatures of peak resistivities were 60 K and 62 K, respectively., Comment: To appear in the Proceedings of ICPS28th (Vienna, Austria, July 24-28, 2006)

We report on detailed room temperature and low temperature transport properties of double-gate Si MOSFETs with the Si well thickness in the range 7-17 nm. The devices were fabricated on silicon-on-insulator wafers utilizing wafer bonding, which enabled us to use heavily doped metallic back gate. We observe mobility enhancement effects at symmetric gate bias at room temperature, which is the finger print of the volume inversion/accumulation effect. An asymmetry in the mobility is detected at 300 K and at 1.6 K between the top and back interfaces of the Si well, which is interpreted to arise from different surface roughnesses of the interfaces. Low temperature peak mobilities of the reported devices scale monotonically with Si well thickness and the maximum low temperature mobility was 1.9 m2/Vs, which was measured from a 16.5 nm thick device. In the magneto transport data we observe single and two sub-band Landau level filling factor behavior depending on the well thickness and gate biasing.

We report on the effect of elastic intervalley scattering on the energy transport between electrons and phonons in many-valley semiconductors. We derive a general expression for the electron-phonon energy flow rate at the limit where elastic intervalley scattering dominates over diffusion. Electron heating experiments on heavily doped n-type Si samples with electron concentration in the range $3.5-16.0\times 10^{25}$ m$^{-3}$ are performed at sub-1 K temperatures. We find a good agreement between the theory and the experiment., Comment: v2: Notations changed: $\Delta_i$ --> $\delta v_i$, $\tau_{eff}$ removed. Eq. (1) changed, Eq. (2) added and complete derivation of Eq. (3) included. Some further discussion about single vs. many valley added [3rd paragraph after Eq. (7)]. End notes removed and new reference added [Kragler and Thomas]. Typos in references corrected

It is shown that the electronic conduction in silicon-on-insulator (SOI) layers exhibits a metallic regime which is very similar to that in high-mobility Si-metal oxide semiconductor structures (MOS). The peak in the electron mobility versus density, the strong drop in resistivity and the critical concentration for the metal-insulator transition are all consistent. On the basis of our SOI data for the temperature and in-plane magnetic field dependence of the resistivity, we discuss several models for the metallic state in two dimensions. We find that the observed behavior can be well described by the theory on the interaction corrections in the ballistic regime. For the investigated regime, the temperature dependent screening of scattering potentials gives also a good description of the data., Comment: 15 pages, 19 figures