Author: "Toshio Ito" / Database: Unpaywall - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Toshio Ito"' showing total 3 results

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3 results on '"Toshio Ito"'

1. High-Reliability Copper Interconnects through Dry Etching Process

Author: Igarashi, Yasushi, primary, Yamanobe, Tomomi, additional, and Toshio Ito, Toshio Ito, additional
Published: 1995
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2. Thermal Stability of Interconnect of TiN/Cu/TiN Multilayered Structure

Author: Igarashi, Yasushi, primary, Yamanobe, Tomomi, additional, Yamaji, Tetsuo, additional, Satoshi Nishikawa, Satoshi Nishikawa, additional, and Toshio Ito, Toshio Ito, additional
Published: 1994
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3. Chemically Amplified Bilevel Resist Based on Condensation of Siloxanes

Author: Sakata, Miwa, primary, Toshio Ito, Toshio Ito, additional, and Yoshio Yamashita, Yoshio Yamashita, additional
Published: 1991
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