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2. New silicon-based micro-electro-mechanical systems for photo-acoustic trace-gas detection

5. Emerging SiC Applications beyond Power Electronic Devices

11. Experimental Demonstration of an Electrostatic Orbital Angular Momentum Sorter for Electron Beams

13. Design, Realization and Challenges of an Orbital Angular Momentum Sorter: A New Instrument for Phase Microscopy

16. Strain Evaluation in SiC MEMS Test Structures

25. Autonomous robotic system for tunnel structural inspection and assessment

29. Ion Implanted Lateral p+-i-n+ Diodes on HPSI 4H-SiC

31. Robotic intelligent vision and control for tunnel inspection and evaluation - The ROBINSPECT EC project

33. Phonon scattering enhancement in silicon nanolayers

36. β-SiC NWs Grown on Patterned and MEMS Silicon Substrates

38. Residual Stress Measurement and Simulation of 3C-SiC Single and Poly Crystal Cantilevers

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