Author: "Kazunori Miyoshi" / Database: Unpaywall - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Kazunori Miyoshi"' showing total 4 results

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4 results on '"Kazunori Miyoshi"'

1. Patterning Characteristics of 0.1-µm Line-and-Space Pattern in Synchrotron Radiation Lithography

Author: Somemura, Yoh, primary, Kimiyoshi Deguchi, Kimiyoshi Deguchi, additional, and Kazunori Miyoshi, Kazunori Miyoshi, additional
Published: 1994
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2. Proximity Effect on Patterning Characteristics of Hole Patterns in Synchrotron Radiation Lithography

Author: Somemura, Yoh, primary, Kimiyoshi Deguchi, Kimiyoshi Deguchi, additional, and Kazunori Miyoshi, Kazunori Miyoshi, additional
Published: 1994
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3. Resolution Enhancement of Hole Patterns in Sychrotron Radiation Lithography

Author: Somemura, Yoh, primary, Deduchi, Kimiyoshi, additional, Kazunori Miyoshi, Kazunori Miyoshi, additional, and Tadahito Matsuda, Tadahito Matsuda, additional
Published: 1993
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4. X-Ray Phase-Shifting Mask for 0.1-µm Pattern Replication under a Large Proximity Gap Condition

Author: Somemura, Yoh, primary, Deguchi, Kimiyoshi, additional, Kazunori Miyoshi, Kazunori Miyoshi, additional, and Tadahito Matsuda, Tadahito Matsuda, additional
Published: 1992
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