10 results on '"Groeger, Philip"'
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2. Development of novel focus spot detection methods for high-volume manufacturing
3. Quantifying CD-SEM contact hole roughness and shape combined with machine learning-based pattern fidelity scores for process optimization and monitoring
4. An in-depth look at comprehensive and efficient methodology for CD uniformity budget breakdown
5. Advanced CD uniformity correction using radial basis function (RBF) models
6. Optimizing focus and dose process windows for robust process control using a multi-feature analysis
7. Real-time full-wafer design-based inter-layer virtual metrology
8. Focus leveling improvement using optimized wafer edge settings
9. CD and OCD sampling scheme optimization for HVM environment
10. Focus budget improvement using optimized wafer edge settings
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