1. The SCattering with Angular Limitation in Projection Electron-Beam Lithography (SCALPEL) System
- Author
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Liddle, J. Alexander, primary, Berger, Steven D., additional, Biddick, Chris J., additional, Blakey, Myrtle I., additional, Bolan, Keven J., additional, Bowler, Stephen W., additional, Brady, Kevin, additional, Camarda, Ron M., additional, Connelly, Wayne F., additional, Crorken, Andy, additional, Custy, Joe, additional, Farrow, Reggie C., additional, Felker, Joe A., additional, Fetter, Linus A., additional, Freeman, Bob, additional, Harriott, Lloyd R., additional, Hopkins, Leslie, additional, Huggins, Harold A., additional, Knurek, Chester S., additional, Kraus, Joe S., additional, Mixon, Dave A., additional, Mkrtchyan, Masis M., additional, Novembre, Anthony E., additional, Peabody, Milton L., additional, Simpson, Wayne M., additional, Tarascon, Regine G., additional, Wade, Harry H., additional, Waskiewicz, Warren K., additional, Watson, G. Patrick, additional, Williams, Joe K., additional, and David L. Windt, David L. Windt, additional
- Published
- 1995
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