184 results on '"Bijkerk F"'
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2. Room temperature oxygen exchange and diffusion in nanometer-thick ZrO2 and MoO3 films
3. Post deposition nitridation of Si in W/Si soft X-ray multilayer systems
4. Interface formation in W/Si multilayers studied by Low Energy Ion Scattering
5. Strengthening ultrathin Si3N4 membranes by compressive surface stress
6. Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation
7. The influence of oxygen on the neutralization of slow helium ions scattered from transition metals and aluminum surfaces
8. Comparative H diffusion measurement through metal and non-metal nano-layers using optical sensing
9. Hydrogen diffusion through Ru thin films
10. W/B short period multilayer structures for soft x-rays
11. A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence
12. Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2
13. Reflective aperiodic multilayer filters for metrology at XUV sources
14. Similarity in ruthenium damage induced by photons with different energies: From visible light to hard X-rays
15. A Collinear Setup for Optical/X-Ray Gross Correlation Measurements Based on Laser-Assisted Auger Decay
16. Soft X-Ray Radiation from Excimer-Driven Laser-Plasma Sources: Application to Submicron Lithography
17. Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study
18. Hydrogenation dynamics of Ru capped Y thin films
19. In-situ studies of silicide formation during growth of molybdenum-silicon interfaces
20. Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures
21. Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers
22. Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength
23. Angular and Spectral Bandwidth of Extreme UV Multilayers Near Spacer Material Absorption Edges
24. Formation of H2O on a CO2 dosed Ru(0 0 0 1) surface under Extreme Ultraviolet Light and H2
25. Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range
26. Self-contained in-vacuum in situ thin film stress measurement tool
27. Plasma-assisted oxide removal from ruthenium-coated EUV optics
28. Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers
29. Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light
30. Metal diffusion properties of ultra-thin high-k Sc2O3 films
31. Thermal stability of high-reflectance La/B-based multilayers for 6.x nm wavelength
32. Tin etching from metallic and oxidized scandium thin films
33. Characterization of Self-Assembled Monolayers on a Ruthenium Surface
34. Blister formation in Mo/Si multilayered structures induced by hydrogen ions
35. Intermixing and thermal oxidation of ZrO2 thin films grown on a-Si, SiN, and SiO2 by metallic and oxidic mode magnetron sputtering
36. Adsorption and Dissociation of CO2 on Ru(0001)
37. Narrowband and tunable anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region
38. Determining crystal phase purity in c-BP through X-ray absorption spectroscopy
39. Detection of defect populations in superhard semiconductor boron subphosphide B12P2 through X-ray absorption spectroscopy
40. A model for pressurized hydrogen induced thin film blisters
41. Exploiting the P L_2,3 absorption edge for optics: spectroscopic and structural characterization of cubic boron phosphide thin films
42. Self-healing in B12P2 through Mediated Defect Recombination
43. Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation
44. Ion acceleration in the transparent regime and the critical influence of the plasma density scale length
45. In vacuo growth studies of Ru thin films on Si, SiN, and SiO2 by high-sensitivity low energy ion scattering
46. Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen
47. Electronegativity-dependent tin etching from thin films
48. Highly efficient blazed grating with multilayer coating for tender X-ray energies
49. Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen
50. Oxygen-stabilized triangular defects in hexagonal boron nitride
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