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3. Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures

Author

Son, Jangyup, primary, Kwon, Junyoung, additional, Kim, SunPhil, additional, Lv, Yinchuan, additional, Yu, Jaehyung, additional, Lee, Jong-Young, additional, Ryu, Huije, additional, Watanabe, Kenji, additional, Taniguchi, Takashi, additional, Garrido-Menacho, Rita, additional, Mason, Nadya, additional, Ertekin, Elif, additional, Huang, Pinshane Y., additional, Lee, Gwan-Hyoung, additional, and M. van der Zande, Arend, additional

Published
2018
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