1. An ultra-compact metasurface-based chromatic confocal sensor.
- Author
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Chan, J.H.T., Tang, D., Williamson, J., Martin, H., Henning, A.J., and Jiang, X.
- Subjects
OPTICAL sensors ,OPTICAL elements ,POSITION sensors ,SENSOR placement ,DETECTORS ,WAVEGUIDES ,OPTICS - Abstract
Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-waveguide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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