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The current state of atomic resolution X-ray holography is discussed on the basis of theoretical simulations and experimental results. The dependence of the spatial resolution on photon energy and angular scan ranges are studied, and presently-used experimental implementations are described together with the data analysis used. Reconstructions of simulated and experimental holograms are compared for a Cu3Au crystal structure. Rigorous experimental realizations of pure direct and reciprocal X-ray holography methods are demonstrated, and future developments and applications of the method are suggested.

Grazing-incidence diffraction (GID) synchrotron radiation X-ray topography was used for a depth-resolved investigation of the defect structure of LiNbO3after surface diffusion doping. Lattice and misfit dislocations as well as strain fields were detected. The method is shown to be effective even for strongly damaged crystals and offers significant advantages for characterization of single crystals and non-perfect epitaxial films.

A new case of X-ray surface back diffraction (SBD), combining features of surface diffraction (grazing of the beams along a crystal surface) and back diffraction (Bragg angle is close to 90°) is studied, both theoretically and experimentally. Dynamical diffraction theory is given for two- and four-wave SBD. Experimental measurements of transmitted and back diffracted intensities are carried out for four-wave SBD of CoKα1radiation from (620) planes of a Ge crystal. It is shown that a number of effects inherent to SBD — a large angular width of reflections, an extreme sensitivity of rocking curves for lattice spacing in a crystal surface layer, the existence of a narrow multiwave dip and the variation of the exit angle of back diffracted waves on rocking curves — may prove to be very useful in synchrotron radiation optics and surface studies with synchrotron radiation.

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