1. Effects of N2O Postdeposition Annealing on Metal-Organic Decomposed CeO2 Gate Oxide Spin-Coated on GaN Substrate.
- Author
-
Quah, H. J., Cheong, K. Y., Hassan, Z., and Lockman, Z.
- Subjects
ANNEALING of metals ,X-ray diffraction ,SCANNING transmission electron microscopy ,X-ray spectroscopy ,METALLIC oxides - Abstract
Effects of postdeposition annealing (PDA) in N
2 O ambient on metal-organic decomposed CeO2 films deposited on GaN substrate had been reported. The utilization of N2 O gas during PDA had successfully suppressed the decomposition of GaN as revealed by x-ray diffraction (XRD). XRD had detected the presence of CeO2 and α-Ce2 O3 phases, wherein the phase transformation of CeO2 to α-Ce2 O3 led to the formation of β-Ga2 O3 interfacial layer (IL). Formation of IL comprising of Ga-O and Ga-O-N compounds in CeO2 /GaN system was verified by dark-field scanning transmission electron microscope image and energy dispersive x-ray line profile, respectively. The metal-oxide-semiconductor characteristics of CeO2 /GaN structure showed a change of negative to positive effective oxide charge (Qeff ) and increasing interface-trap density (Dit ) as a function of PDA temperature. The highest oxide breakdown field demonstrated by 1000°C-annealed sample was correlated with Qeff and Dit . A detailed explanation on this correlation as well as current transport mechanism in these oxides has been presented. [ABSTRACT FROM AUTHOR]- Published
- 2011
- Full Text
- View/download PDF