1. High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System
- Author
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Li, Guanghui, Cai, Changchun, Zhang, Yan, Deng, Xiong, Lin, Liangzhong, and Xiao, Wenbo
- Abstract
In this article, a novel optical micro-electromechanical system (MEMS) acceleration sensor based on a metal Fabry–Pérot (FP) microcavity is investigated using the transfer matrix method (TMM) and finite element analysis (FEA). The analytical calculation and simulation results show that the accelerometer has a wide measurement range, high sensitivity and resolution, good linearity, and low cross-axis sensitivity over the whole wavelength modulation range. The accelerometer has a linear measurement range of ±251 g, an optical system sensitivity of 1.9038, a mechanical sensitivity of 10.92 nm/g, a cross-axis sensitivity on the orthogonal axis as low as 0.09%, an accelerometer sensitivity up to 20.79 nm/g, and a resolution of
$48.10~\mu \text{g}$ $\delta \lambda $ - Published
- 2024
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