1. The Characteristics of Cu2O Thin Films Deposited Using RF-Magnetron Sputtering Method with Nitrogen-Ambient.
- Author
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Seong Hyun Lee, Sun Jin Yun, and Jung Wook Lim
- Subjects
COPPER oxide ,NITROGEN ,SPUTTER deposition ,BAND gaps ,THIN films ,OPTICAL properties measurement - Abstract
We investigate the characteristics of Cu
2 OO thin films deposited through the addition of N2 O gas. The addition of N2 O gas has remarkable effects on the phase changes, resulting in improved electrical and optical properties. An intermediate phase (6CuO·Cu2 O) appears at a N2 O flow rate of 1 sccm, and a Cu2 OO (200) phase is then preferentially grown at a higher feeding amount of N2 O. The optical and electrical properties of Cu2O thin films are improved with a sufficient N2 O flow rate of more than 15 sccm, as confirmed through various analyses. Under this condition, a high bandgap energy of 2.58 eV and a conductivity of 1.5×10-2 S/cm are obtained. These high-quality Cu2 OO thin films are expected to be applied to Cu2 OO-based heterojunction solar cells and optical functional films. [ABSTRACT FROM AUTHOR]- Published
- 2013
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