1. A newly developed three-dimensional profile scanner with nanometer spatial resolution.
- Author
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Shinno, H., Yoshioka, H., Gokan, T., and Sawano, H.
- Subjects
THREE-dimensional imaging ,SCANNING systems ,NANOELECTROMECHANICAL systems ,OPTICAL resolution ,DIMENSIONAL analysis ,SCANNING tunneling microscopy ,ENGINEERING inspection - Abstract
Abstract: Demands for characterization of three dimensional (3D) micro-geometries and surface topographies over a large area have recently increased in many industries. This paper presents a newly developed 3D profile measuring machine with a nanometer spatial resolution. The machine developed is composed of an active vibration isolating system, a planar nano-motion table system driven by voice coil motors, a vertical nano-motion platform driven by a hybrid actuator, and a probing system based on the scanning tunneling microscopy principle. Performance evaluation results confirm that the machine can be successfully conducted the characterization of micro-geometries and surface topographies. [Copyright &y& Elsevier]
- Published
- 2010
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