7 results on '"Delachat, F."'
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2. Nanoimprint, DSA, and multi-beam lithography: patterning technologies with new integration challenges
3. Process highlights to enhance DSA contact patterning performances
4. Evaluation of adhesion layers performances for soft UV nanoimprint lithography
5. Dependencies of bias tables to pattern density, critical dimension, global coordinates and pattern orientation for nanoimprint master manufacturing for the 200 mm wafer scale SmartNIL process
6. Evaluation of anti-sticking layers performances for 200mm wafer scale Smart NILTMprocess through surface and defectivity characterizations
7. Spectroscopic ellipsometry characterization of microwave CVD grown silicon nanoparticles embedded in a silicon nitride matrix
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