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The use of cobalt based alloys in micro-electromechanical systems (MEMS) applications seems feasible and promising as these materials are compatible with both planar and bulk technologies involved in MEMS processing. Co–Ni, Co–Mo and Co–Ni–Mo alloys can fulfil the demand for new materials in the MEMS sector especially in the magnetic actuation field. The route to obtain these alloys must take into consideration the plating bath design, the deposition parameters and the ex situ characterisation of the deposits. A continuous feedback study based on these items allows tailoring the deposit properties until deposit optimisation is achieved. This optimisation is not only focused on finding out the more appropriate mechanical and magnetic properties, but on achieving adherent, uniform, low stressed electrodeposited layers. [ABSTRACT FROM AUTHOR]