Author: "Shamiryan, D." / Database: Springer Nature Journals - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Shamiryan, D."' showing total 3 results

Start Over Author "Shamiryan, D." Database Springer Nature Journals

3 results on '"Shamiryan, D."'

1. Charging of submicron structures during silicon dioxide etching in one- and two-frequency gas discharges

Author: Palov, A. P., Mankelevich, Yu. A., Rakhimova, T. V., and Shamiryan, D.
Published: 2010
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2. Plasma etching: From micro- to nanoelectronics

Author: Shamiryan, D., Paraschiv, V., Boullart, W., and Baklanov, M. R.
Published: 2009
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3. Optimization of low-k UV Curing: Effect of Wavelength on Critical Properties of the Dielectrics

Author: Aksenov, German, Roest, D. De, Verdonck, P., Dultsev, F. N., Marsik, P., Shamiryan, D., Arai, H., Takamure, N., and Baklanov, M. R.
Published: 2008
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