8 results on '"Zarfl C"'
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2. Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures
3. Impact of adhesion promoters and sputter parameters on the electro-mechanical properties of Pt thin films at high temperatures
4. Influence of the sputter gas composition on the electromechanical properties and on the stability of TiAlNxO1-x thin films
5. A Novel Miniaturised Sensor for Combined Static and Dynamic Pressure Measurements in Harsh Environments
6. Electro-mechanical properties and oxidation behaviour of TiAlNxOy thin films at high temperatures
7. Gauge Factor of Titanium/Platinum Thin Films up to 350°C
8. TiAlN Thin Films as High Temperature Strain Gauges
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