18 results on '"Voelskow, M."'
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2. Flash-lamp annealing of semiconductor materials—Applications and process models
3. Ion implantation-induced damage depth profile determination in SiC by means of RBS/C and bevelling technique
4. Advanced thermal processing of semiconductor materials in the millisecond range
5. Annealing studies of Al-implanted 6H-SiC in an induction furnace
6. The beneficial role of flash lamp annealing on the epitaxial growth of the 3C–SiC on Si
7. Investigation of Al-implanted 6H– and 4H–SiC layers after fast heating rate annealings
8. Crystallization and surface erosion of SiC by ion irradiation at 500°C
9. Characterisation of defects in ion implanted SiC by slow positron implantation spectroscopy and Rutherford backscattering
10. Transient enhanced diffusion and electrical activation of As in Si during rapid thermal annealing
11. Epitaxial lateral overgrowth of amorphous CVD silicon films induced by ion irradiation
12. MeV carbon implantation into silicon: microstructure and electrical properties
13. Ion beam synthesis by tungsten-implantation into 6H-silicon carbide
14. Radiation damage and annealing behaviour of Ge +-implanted SiC
15. RBS and channeling analysis of cobalt disilicide layers produced by focused ion beam implantation
16. Epitaxial Lateral Overgrowth of Amorphous Cvd Silicon Films Induced by Ion Irradiation
17. Ion beam synthesis by tungsten-implantation into 6H—silicon carbide
18. Ion Beam Induced Epitaxial Crystallization of SiC: Fluence -and Temperature Dependence
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