5 results on '"Cattoni, Andrea"'
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2. Sub-10 nm electron and helium ion beam lithography using a recently developed alumina resist
3. Nanoimprint stamps with ultra-high resolution: Optimal fabrication techniques
4. A versatile pattern inversion process based on thermal and soft UV nanoimprint lithography techniques
5. Soft UV-NIL at 20 nm scale using flexible bi-layer stamp casted on HSQ master mold
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