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Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.

PUBLISHED, A method is described for the fabrication of magnetic force microscopy tips via localized electrodeposition and focused ion beam milling departing from commercial tapping mode tips. Very high aspect ratios and interacting magnetic moments are possible without altering significantly the tapping resonant frequency of the cantilever. These tips can achieve high magnetic resolution at room temperature and open atmosphere. They can also be fabricated into any shape, with applications for ferromagnetic resonance measurements and nano-imprinting., The authors would like to thank Dr. C. Fitzgerald for the PLD Fe-doped SnO film. This work was supported by Science Foundation Ireland as part of the CINSE and MANSE projects.

Tip-enhanced Raman scattering (TERS) spectroscopy is a promising technique for nanoscale chemical analysis. However, there are several challenges preventing widespread application of this technology, including reproducible fabrication of efficient TERS probes. These problems reflect a lack of clear understanding of the origins of, and the parameters influencing TERS. It is believed that the coating characteristics at the apex of the tip have a major effect on the near-field optical enhancement and thus the TERS activity of a metalized probe. Here we show that the aspect ratio of the tip can play a significant role in the efficiency of TERS probes. We argue that the electrostatic field arising from the lightning-rod effect has a substantial role in the observed TERS effect. This argument is supported by 'edge-enhanced Raman scattering' which is shown for a noble metal film. Furthermore, it is reported that an associated tip-surface-enhanced Raman scattering effect can be achieved by using a TERS-inactive metalized probe on a surface-enhanced Raman spectroscopy-inactive roughened surface. This observation can be explained by an interparticle enhancement of the electromagnetic field. Refereed/Peer-reviewed

We report on progress in the fabrication of cantilever arrays with tips. The process features only one lithographic step for the definition of both the tips and cantilevers. The tips have a uniform height distribution and are placed by selfalignment on the cantilever. The arrays are fabricated for an optical readout technique under development in which the cantilever arrays serve as diffraction gratings. This work describes our ongoing effort in array fabrication as well as preliminary results on optical readout of a previously fabricated batch of tipless cantilever arrays using Fraunhofer diffraction.

We report on progress in the fabrication of cantilever arrays with tips. The process features only one lithographic step for the definition of both the tips and cantilevers. The tips have a uniform height distribution and are placed by selfalignment on the cantilever. The arrays are fabricated for an optical readout technique under development in which the cantilever arrays serve as diffraction gratings. This work describes our ongoing effort in array fabrication as well as preliminary results on optical readout of a previously fabricated batch of tipless cantilever arrays using Fraunhofer diffraction.