1. Highly Flexible Touch Screen Panel Fabricated with Silver Nanowire Crossing Electrodes and Transparent Bridges
- Author
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Heungseok Go, Kibog Park, Sungchul Jung, Youngeun Jeon, Young Kuil Joo, Choon-Hyop Lee, Innam Lee, and Hanbyul Jin
- Subjects
Fabrication ,Materials science ,business.industry ,Insulator (electricity) ,Nanotechnology ,Capacitance ,Atomic and Molecular Physics, and Optics ,law.invention ,Atomic layer deposition ,law ,visual_art ,Electrode ,visual_art.visual_art_medium ,Optoelectronics ,Photomask ,Photolithography ,Polycarbonate ,business - Abstract
A capacitive-type touch screen panel (TSP) composed of silver nanowire (AgNW) crossing electrodes and transparent bridge structures was fabricated on a polycarbonate film. The transparent bridge structure was formed with a stack of Al-doped ZnO (AZO) electrodes and SU-8 insulator. The stable and robust continuity of the bridge electrode over the bridge insulator was achieved by making the side-wall slope of the bridge insulator low and depositing the conformal AZO film with atomic layer deposition. With an extended exposure time of photolithography, the lower part of the SU-8 layer around the region uncovered by the photomask can be exposed enough to the UV light scattered from the substrate. This leads to the low side-wall slope of the bridge insulator. The fabricated TSP sample showed a large capacitance change of 22.71% between with and without touching. Our work supplies the technological clue for ensuring long-term reliability to the highly flexible and transparent TSP made by using conventional fabrication processes.
- Published
- 2015
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