In this paper, the improvement by deconvolution of the depth resolution in Secondary Ion Mass Spectrometry (SIMS) analysis is considered. Indeed, we have developed a new Tikhonov- Miller deconvolution algorithm where a priori model of the solution is included. This is a denoisy and pre-deconvoluted signal obtained from: firstly, by the application of wavelet shrinkage algorithm, secondly by the introduction of the obtained denoisy signal in an iterative deconvolution algorithm. In particular, we have focused the light on the effect of the iterations number on the evolution of the deconvoluted signals. The SIMS profiles are multilayers of Boron in Silicon matrix., {"references":["M. Boulakroune and D. Benatia, \"MultiscaleDeconvolution of Mass\nSpectrometry Signals,\" inAdvanced in Wavelet Theory and Their\nApplications in Engineering, Physics and Technology, In-Tech, 2012,\nch. 7, pp. 125-152.","Yu.N.Drozdov, M. N. Drozdov, A.V. Novikov, P. A. Yunin,and D. V.\nYurasov, \"Layer-by-layerAanalysis ofStructures Containing delta-layers\nby Secondary Ion Mass Spectrometry Taking into Account the TOF-5\nDepth Resolution Function,\"Journal of Surface Investigation, Russian,\nJuly 2012,Vol.6,pp. 574-577.","M. Boulakroune and D. Benatia, \"Improvement of SIMS Multilayer\nProfile Analysis,\" in 6th International Conference on Sciences of\nElectronics, Technologies of Information and Telecommunications\n(SETIT), Sousse 2012, IEEExplore, pp. 716-720.","N. Dahraoui, M. Boulakroune and D. Benatia, \"Traitements numériques\ndes measures par Spectrométrie de masse des Ions Secondaires.\nQuantification des profils en profondeur, Nouvel Algorithme de\nDéconvolution Multi-Résolution,\" in International Congress on\nTelecommunication and Application ICTA'2014, Bejaia- Algeria, 2014,\npp. 325-330.","V. V. Makarov, \"Deconvolution of high dynamic range depth profiling\ndata using the Tikhonov method,\" J. Surf. Interface. Anal. Vol. 27, 1999,\npp. 801-816.","B. Gautier, J. C. Dupuy, R. Prost and G. Prudon, \"Effectiveness and\nlimits of the deconvolution of SIMS depth profiles of boron in\nsilicon,\"Journal of Surface and Interface Analysis, Vol.25, 1997. pp.\n464-477.","B. Gautier, G. Prudon and J. C. Dupuy, \"Toward a better reliability in\nthe deconvolution of SIMS depth profiles,\"Surface and Interface\nAnalysis, 1998, Vol.26, pp. 974-983.","R. Collins, M. G. Dowsett and A. Allen, \"Deconvolution of\nconcentration profiles from SIMS data using measured response\nfunction,\" In International Conference on SIMS, Amesterdam, 1991, pp.\n111-114.","P.N. Allen and M.G. Dowsett, \"Maximum entropy quantification of\nSIMS depth profiles. Behavior as a function of primary ion energy,\"\nSurf. Interface Anal., Vol. 21, 1994, pp. 206-209.\n[10] V. Barakat, B. Guilpart R. Goutte and R. Prost, \"Model-based\nTikhonov- Miller image restoration, \"in International Conference on\nImage Processing (ICIP'97), Washington,IEEExplore,DC, USA,\n1997.Vol. 1, pp. 310-313.\n[11] G. Mancina, R. Prost, G. Prudon, B. Gautier and J. C. Dupuy,\n\"Deconvolution SIMS depth profiles: toward the limits of the resolution\nby self-deconvolution test,\" in SIMS Proceedings papers, the 12th SIMS\nInternational Conference, Elsevier, Brussels, Belgium, 1999. pp. 5-11\n[12] J. Bennett and A. Diebold, \"Round robin study of ultra-shallow B depth\nprofiling experimental conditions,\" In International Conference on\nSecondary Ion Mass Spectrometry1999: Brussels, Belgium ( SIMS XII),\nA. Benninghoven ed. Amesterdam: Elsevier, 2000. pp. 541-548."]}