1. In-situ measurements of ion implantation effects on YBCO superconducting films
- Author
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Peng Yougui, Fan Xiangjun, Liu Chang, Meng Xianquan, Ye Minghsen, Cai Fengxin, Peng Zhilin, Guo Huaixi, and Jiang Changzhong
- Subjects
Materials science ,Analytical chemistry ,Surfaces and Interfaces ,General Chemistry ,Sputter deposition ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Ion ,Ion implantation ,Electrical resistance and conductance ,Sputtering ,Physical vapor deposition ,Cavity magnetron ,Materials Chemistry ,Thin film ,Nuclear chemistry - Abstract
This superconducting films of YBa2Cu3O7 have been deposited on SrTiO3 substrates using a home-made hollow cathode magnetron sputtering system. The samples were placed on a variable-temperature target stage of a 200 keV implanter and then bombarded by O+ to different doses. The electrical resistance of the samples and its dependence on both ion dose and temperature were measured in situ. Our experimental results reveal that the resistive behavior is extremely sensitive to ion dose, and the ion damage has a strong effect on the transport properties of these films.
- Published
- 1994