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В данной работе впервые изучено влияние импульсного лазерного отжига (ИЛО) излучением рубинового лазера на слои монокристаллического Si, имплантированного ионами Ge+и Ag+, с целью создания кристаллического композитного плазмонного материала Ag:GeSi. Изучена трансформация структуры слоя и его оптического отражения в зависимости от режимов отжига. In this work for the first time the effect of pulsed laser annealing by ruby laser radiation to monocrystalline Si layers implanted by Ge+and Ag+ ions in order to produce crystalline composite plasmonic Ag:GeSi material is studied. The transformation of layer structure and its optical reflectance depending on annealing regimes is investigated. Работа выполнена при финансовой поддержке РНФ № 17-12-01176.

I. Avrasya Nükleer Bilimler ve Uygulamaları Konferansı : 23-27 Ekim 2000. İzmir, Türkiye. Thin metal-polymer composite films were synthesized by high-dose implantation of 40 keV Fe+ and Co+ ions into epoxy and silicone polymers. The influence of both an initial relaxation state (viscosity) of polymer target and a dose of implantation on microstructures and magnetic properties of ion synthesized composite materials was investigated. The process of nucleation and growth of metal nanophase in polymer volume with dose increasing were observed by transmission electron microscopy. It was shown that various metal nanostructures (isolated particles with different morphology and sizes, multi-particles clusters, fractal-type agglomerates) and quasi-continuous monocrystalline films are formed at different initial viscosity of the targets, kinds of implanted ions and doses of implantation. Magnetic properties of metal-polymer composite films were studied by ferromagnetic resonance (FMR) method. The observed FMR spectra and their orientation dependencies reflect the essential differences in the magnetic properties of the composite films formed in the epoxy and silicone substrates at different viscosity and doses. The dose dependencies of effective magnetization are presented for iron-implanted silicone films synthesized at different relaxation state of polymer substrate. The dependence of FMR spectra on a type of implanted atoms (iron or cobalt) is also discussed.