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1. Spectroscopic Ellipsometry Characterization of Hydrogenated Amorphous Silicon Thin Film

Author

郭安然 Guo Anran, 祁康成 Qi Kangcheng, 蒋亚东 Jiang Yadong, 李伟 Li Wei, 徐睿 Xu Rui, and 何剑 He Jian

Subjects
Amorphous silicon, chemistry.chemical_compound, Materials science, chemistry, business.industry, Optoelectronics, Spectroscopic ellipsometry, Thin film, business, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Characterization (materials science)
Published
2013

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