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Fast and efficient Computer Aided Design (CAD) tools for microfluidic components and systems were developed in this effort. Innovative numerical methods and algorithms for mixed-technology simulation of microfluidic devices and systems are described. Algorithms and techniques for coupled circuit/device modeling of microfluidic systems are presented. Test structures and devices were fabricated, and measurements taken to enable the computational prototyping of microfluidics and Micro-Electro Mechanical Systems (MEMS)., The original document contains color images.