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This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited multilayer giant magnetoresistive (GMR) sensor. The device consists of a micromachined microstructure (membrane), GMR sensor, and a sputtered hard magnetic thin film element on to microstructure.

Thermal control surfaces are used in every spacecraft thermal management system to dissipate heat through radiant heat transfer. This paper describes the thermal performance of several thermal control paints, coatings, and surfaces, as characterized by a calorimetric vacuum emissometer. The emissometer is designed to measure the functional emittance of a surface based on heat transfer from an underlying substrate to the surface and from the surface or near surface to a surrounding cold wall. Emittance measurements were made between 200 and 350 K. Polished aluminum, used here as a standard, was found to have a total hemispherical emittance of 0.06, as expected. A velvet black paint, also used here as a standard, was found to have an emittance of 0.94 at room temperature. Other surfaces of interest included a polyurethane-based black paint designated Z-306, a highly polished 316L stainless steel, and an atomic oxygen beam-textured carbon-carbon composite.

Thermal barrier coatings were exposed to the high temperature and high heat flux produced by a 30 kW plasma torch. Analysis of the specimen heating rates indicates that the temperature drop across the thickness of the 0.038 cm ceramic layer was about 1100 C after 0.5 sec in the flame. An as-sprayed ZrO2-8 percent Y2O3 specimens survived 3000 of the 0.5 sec cycles with falling. Surface spalling was observed when 2.5 sec cycles were employed but this was attributed to uneven heating caused by surface roughness. This surface spalling was prevented by smoothing the surface with silicon carbide paper or by laser glazing. A coated specimen with no surface modification but which was heat treated in argon also did not surface spall. Heat treatment in air led to spalling in as early as 1 cycle from heating stresses. Failures at edges were investigated and shown to be a minor source of concern. Ceramic coatings formed from ZrO2-12 percent Y2O3 or ZrO2-2O percent Y2O3 were shown to be unsuited for use under the high heat flux conditions of this study.