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Microfabrication technology with quartz crystals is gaining importance as the miniaturization of quartz MEMS devices is essential to ensure the development of portable and wearable electronics. However, until now, there have been no reports of dimension compensation for quartz device fabrication. Therefore, this paper studied the wet etching process of Z-cut quartz crystal substrates for making deep trench patterns using Au/Cr metal hard masks and proposed the first quartz fabrication dimension compensation strategy. The size effect of various sizes of hard mask patterns on the undercut developed in wet etching was experimentally investigated. Quartz wafers masked with initial vias ranging from 3 μm to 80 μm in width were etched in a buffered oxide etch solution (BOE, HF:NH 4 F = 3:2) at 80 °C for prolonged etching (>95 min). It was found that a larger hard mask width resulted in a smaller undercut, and a 30 μm difference in hard mask width would result in a 17.2% increase in undercut. In particular, the undercuts were mainly formed in the first 5 min of etching with a relatively high etching rate of 0.7 μm/min (max). Then, the etching rate decreased rapidly to 27%. Furthermore, based on the etching width compensation and etching position compensation, new solutions were proposed for quartz crystal device fabrication. And these two kinds of compensation solutions were used in the fabrication of an ultra-small quartz crystal tuning fork with a resonant frequency of 32.768 kHz. With these approaches, the actual etched size of critical parts of the device only deviated from the designed size by 0.7%. And the pattern position symmetry of the secondary lithography etching process was improved by 96.3% compared to the uncompensated one. It demonstrated significant potential for improving the fabrication accuracy of quartz crystal devices., Competing Interests: The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

Food safety is a widespread global concern with the emergence of foodborne diseases. Thus, establishing accurate and sensitive detection methods of harmful contaminants in different food matrices is essential to address and prevent the associated health risks. Among various analytical tools, mass spectrometry (MS) can quantify multiple impurities simultaneously due to high resolution and accuracy and can achieve non-target profiling of unknown pollutants in food. Therefore, MS has been widely used for determination of hazardous contaminants [e.g., mycotoxin, pesticide and veterinary drug residues, polychlorinated biphenyls (PCBs), dioxins, acrylamide, perfluorinated compounds (PFCs) and p-Phenylenediamine compounds (PPDs) in food samples]. This work summarizes MS applications in detecting harmful contaminants in food matrices, discusses advantages of MS for food safety study, and provides a perspective on future directions of MS development in food research. With the persistent occurrence of novel contaminants, MS will play a more and more critical role in food analysis., Competing Interests: The authors declare that the research was conducted in the absence of any commercial or financial relationships that could be construed as a potential conflict of interest., (Copyright © 2023 Sun, Dong, Wen, Zhang, Hou, Zhao and Yin.)