1. SU-8-Based nanocomposites for acoustical matching layer
- Author
-
Shengxiang Wang, Campistron, Pierre, Carlier, Julien, Callens-Debavelaere, Dorothee, Nongaillard, Bertrand, NDieguene, Assane, Nassar, Georges, Soyer, Caroline, and Xingzhong Zhao
- Subjects
Audiometry, Impedance -- Analysis ,Silicon -- Acoustic properties ,Silicon -- Electric properties ,Titanium dioxide -- Acoustic properties ,Titanium dioxide -- Electric properties ,Business ,Electronics ,Electronics and electrical industries - Abstract
An epoxy-based photoresist, SU-8, is introduced as the acoustical matching layer between silicon and water for lab-on-chip applications integrating acoustic characterization. A monolayer nanocomposite with the necessary impedance for acoustical matching between silicon and water is made by using SU-8 and Ti[O.sub.2] nanoparticles.
- Published
- 2009