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1.O MeV F ions with a dose of 10 to the power 15 ions per square centimeter is used for implanting X, Y and Z crystalline cut LiNbO3 crystals. The Rutherfood backscattering and channeling techniques are used in the investigations of the virgin and implanted LiNbO3. The minimum yield of the virgin crystals were 4%, 8% and 6% for X-, Y- and Z-cut LiNbO3.

Rutherford backscattering spectroscopy was used to investigate MeV Cu ion-implantation induced lattice disorder in LiNbO3 crystals. The results showed that a large part of the energy deposited by electronic excitation produced point defects and color centers. The small amount of nuclear deposited energy initially deposited was adequate to create defects in the surface region.